High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials

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High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials

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ژورنال

عنوان ژورنال: Sensors

سال: 2006

ISSN: 1424-8220

DOI: 10.3390/s6040405