High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials
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چکیده
منابع مشابه
High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials
Micromachined thermal heater platforms offer low electrical power consumption and high modulation speed, i.e. properties which are advantageous for realizing nondispersive infrared (NDIR) gasand liquid monitoring systems. In this paper, we report on investigations on silicon-on-insulator (SOI) based infrared (IR) emitter devices heated by employing different kinds of metallic and semiconductor ...
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ژورنال
عنوان ژورنال: Sensors
سال: 2006
ISSN: 1424-8220
DOI: 10.3390/s6040405